產品與服務
Products & Services

Etch Spare Parts

  • 300 mm RTP WINDOW

    Additional information

    Material

    Quartz

    Process

    Diffusion

  • Baffle Plate

    Additional information

    Material

    Si

  • Bell Jar

    Additional information

    Material

    Quartz

  • Chamber Wall Liner

    Additional information

    Material

    Metal

    Process

    Etch

  • Coupling Ring

    Additional information

    Material

    Quartz

  • DEPO Shield Ring

    Additional information

    Material

    Metal

  • Electrode

    Additional information

    Material

    Si

  • Gas injector

    Additional information

    Material

    Quartz

  • Ground Ring

    Additional information

    Material

    Quartz

  • Insert Ring

    Additional information

    Material

    Si

  • Pedestal AL Flat 86

    Additional information

    Material

    Metal

  • Quartz Baffle

    Additional information

    Material

    Quartz

    Process

    Etch

  • Quartz Baffle

    Additional information

    Material

    Quartz

    Process

    Etch

  • Quartz Baffle改款

    Additional information

    Material

    Quartz

    Process

    Etch

  • Quartz Injector

    Additional information

    Material

    Quartz

    Process

    Etch

  • Quartz Injector

    Additional information

    Material

    Quartz

    Process

    Etch

  • Quartz Injector

    Additional information

    Material

    Quartz

    Process

    Etch

  • Quartz Wafer Chuck

    Additional information

    Material

    Quartz

  • Quartz Wafer Guide

    Additional information

    Material

    Quartz

  • Ring Clamp

    Additional information

    Material

    Ceramic

  • Six Ring

    Additional information

    Material

    Quartz

  • Top Ring

    Additional information

    Material

    Si

Product Info

Description

AMT/TEL/LAM/Mattson equipments and parts

Usage

Oxid process、Poly process、Metal process、Stripper process

Specs

Quartz ring、Quartz Plate Si ring、Si Upper Electrode、Si Cell body

Contact

曾俊翔 Paulson Tseng

TEL : (03) 564-1224 ext.1606
Email : Paulson.tseng@tteam.com.tw