PVD Spare Parts
CLR Lower Shield
Additional information
Material Metal
CLR Upper Shield
Additional information
Material Metal
Collimator
Additional information
Material Metal
Quartz Liner
Additional information
Material Quartz
Process 8" EPI
Quartz Lower Dome
Additional information
Material Quartz
Process 8" EPI
Quartz Upper Dome
Additional information
Material Quartz
Process 8" EPI
Product Info
Description
AMT/Novellus設備之關鍵零件耗材
Usage
PVD
Spec
Quartz ring、Quartz Plate O-ring、Ceramic、Silt valve door Metal Parts
Contact
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Shower Head 66
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Quartz Lower Dome
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Process 8" EPI
Quartz Liner
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Process 8" EPI
DEPO Shield Ring
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Collimator
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Material Metal
CLR Upper Shield
Additional information
Material Metal
