產品與服務
Products & Services

PVD Spare Parts

  • CLR Lower Shield

    Additional information

    Material

    Metal

  • CLR Upper Shield

    Additional information

    Material

    Metal

  • Collimator

    Additional information

    Material

    Metal

  • Quartz Liner

    Additional information

    Material

    Quartz

    Process

    8" EPI

  • Quartz Lower Dome

    Additional information

    Material

    Quartz

    Process

    8" EPI

  • Quartz Upper Dome

    Additional information

    Material

    Quartz

    Process

    8" EPI

Product Info

Description

AMT/Novellus設備之關鍵零件耗材

Usage

PVD

Spec

Quartz ring、Quartz Plate O-ring、Ceramic、Silt valve door Metal Parts

Contact

曾俊翔 Paulson Tseng

TEL : (03) 564-1224 ext.1606
Email : Paulson.tseng@tteam.com.tw