Products
Top Ring
Material
- Quartz, Si
Process
Insert Ring
Material
- Quartz, Si
Process
Electrode
Material
- Quartz, Si
Process
Ring Clamp
Material
- Metal, Quartz
Process
Pedestal AL Flat 86
Material
- Metal, Quartz
Process
DEPO Shield Ring
Material
- Metal, Quartz
Process
Chamber Wall Liner
Material
- Metal
Process
- Etch
300 mm RTP WINDOW
Material
- Quartz
Process
- Diffusion
Quartz Injector 改款 (可自行調整間距)
Material
- Quartz
Process
Quartz Injector 改款
Material
- Quartz
Process
- Etch
Quartz Injector
Material
- Quartz
Process
- Etch
Quartz Baffle 改款 (可自行調整孔洞)
Material
- Quartz
Process
- Etch
Quartz Baffle改款
Material
- Quartz
Process
- Etch
Quartz Baffle
Material
- Quartz
Process
- Etch
Insulator 3 pieces
Material
- Ceramic
Process
