Etch Spare Parts
Silicon-graphite composite material electrode
Material
- Graphite
Process
Silicon-graphite composite material electrode 矽/石墨 複合材電極
Material
- Graphite
Process
- Etch
Si3N4 GDP 10 holes
Material
- Si3N4
Process
- Etch
Si3N4 GDP 10 holes
Material
- Si3N4
Process
- Etch
藍寶石無氧銅螺紋棒
Material
- Sapphire
Process
- Etch
Sapphire rod with oxygen-free copper
Material
Process
Quartz Gas Injector
Material
- Quartz
Process
- Etch
Quartz Gas Injector
Material
- Quartz
Process
- Etch
Quartz Ground Cover Ring
Material
- Quartz
Process
300mm ceramic wafer carrier
Material
- Ceramic
Process
Quartz Bath
Material
- Quartz
Process
Quartz Boat
Material
- Quartz
Process
Quartz In-Line Heater
Material
- Quartz
Process
Quartz Valve
Material
- Quartz
Process
Quartz SRD Half-Moon
Material
- Quartz
Process
Product Info
Description
AMT/TEL/LAM/Mattson equipments and parts
Usage
Oxid process、Poly process、Metal process、Stripper process
Specs
Quartz ring、Quartz Plate Si ring、Si Upper Electrode、Si Cell body
