產品與服務
Products & Services

Etch Spare Parts

Quartz Ground Cover Ring
Material
Process
300mm ceramic wafer carrier
Material
Process
Quartz Bath
Material
Process
Quartz Boat
Material
Process
Quartz In-Line Heater
Material
Process
Quartz Valve
Material
Process
Quartz SRD Half-Moon
Material
Process
G3 Mask Quartz Plate (VLR 700)
Material
Process
G3 Mask Quartz Plate
Material
Process
Quartz In-line Heater
Material
Process
Quartz Bath
Material
Process
Quartz Wafer Chuck
Material
Process
Quartz Wafer Guide
Material
Process
Ground Ring
Material
Process
Six Ring
Material
Process

Product Info

Description

AMT/TEL/LAM/Mattson equipments and parts

Usage

Oxid process、Poly process、Metal process、Stripper process

Specs

Quartz ring、Quartz Plate Si ring、Si Upper Electrode、Si Cell body

Contact

曾俊翔 Paulson Tseng

TEL : (03) 564-1224 ext.1606
Email : Paulson.tseng@tteam.com.tw