PVD Spare Parts
Ceramic Mask
Material
- Ceramic
Process
Quartz Upper Dome
Material
- Quartz
Process
- 8"EPI
Quartz Liner
Material
- Quartz
Process
- 8"EPI
Quartz Lower Dome
Material
- Quartz
Process
- 8"EPI
CLR Upper Shield
Material
- Metal
Process
Collimator
Material
- Metal
Process
CLR Lower Shield
Material
- Metal
Process
Product Info
Description
AMT/Novellus設備之關鍵零件耗材
Usage
PVD
Spec
Quartz ring、Quartz Plate O-ring、Ceramic、Silt valve door Metal Parts
Contact
曾俊翔 Paulson Tseng
TEL : (03) 564-1224 ext.1606
Email : Paulson.tseng@tteam.com.tw
