CVD Spare Parts
Product Info
Descriptions
AMT/Novellus equipment and parts
Usage
TEOS、SiH4
Specs
Ceramic ring、Ceramic Plate O-ring、Ceramic tube、Silt valve door Metal Parts
AMT/Novellus equipment and parts
TEOS、SiH4
Ceramic ring、Ceramic Plate O-ring、Ceramic tube、Silt valve door Metal Parts
Taiwan E&M Systems, Inc.
Address: 1F No.16, Prosperity 2nd Road, Science Based Industrial Park, Hsin-Chu 30078, Taiwan R.O.C.
TEL : 886-3-564-1224
FAX : 886-3-563-3987