Description
We act agents of Hitachi Metals for a series of AERA MFC(Mass Flow controller) products in Taiwan. We also established Aera MFC after-sales service center. We provide repair and filed service in Taiwan.
Spec
- Analog Series (FC-R7700/R7800 series)
- Digital Series (FC-DR980series, Transformer, HG-200, HC-100)
- PI Series (PI 980 series)
- High Temperature MFC
| Spec | Product | Introduction |
|---|---|---|
| FC-R7700 series |  | For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes. |
| FC-R7800 series |  | Delivers precise flow control, as well as the superior resistance and ultra-high leak integrity of metal seals, to suit the majority of gas-controlled applications. Convenience-enhancing features, such as a choice of standard of Aera-exclusive electrical. |
| FC-DR980 Series Discountinued. Can be replace by HC100 |  | Digital MFC and MFM (mass flow meters) deliver performance excellence and operational versatility, resulting in significant cost savings and ease of use. Multiple output options enable analog or digital control, for use with most existing control and communication configurations. |
| Transformer Digital Series |  | Suitable for a variety of applications, including CVD, PVD, diffusion, and etch, This product line will transform your process, providing optimal flexibility and efficiency for improved yield, higher productivity, and lower cost of ownership. |
| FC-PIR980 Series Discountinued. Can be replaceby HG-200 series. |  | Provides faster response, greater gas flow stability, higher accuracy, and superior real-time process control. In addition to integrated diagnostics, it has been combined with our field-proven D980 series product platform to increase system uptime and make troubleshooting quick and easy. |
| HG-200 Series (PI Series) |  | New Generation MFC. Quick flow-response, high reliability and reproducibility. Self -diagnostic Semiconductor manufacture (CVD, PVD, diffusion, and etch). |
| HC-100 Series (non-PI Series) |  | New Generation MFC. Quick flow-response. High reliability and Reproducibility. Semiconductor manufacture (CVD, PVD, diffusion, and etch). |
