LED Industry Spare parts
Disk( SIC coating on surface)
Material
- Graphite
Process
- MOCVD
Suscepter( SIC coating on surface)
Material
- Graphite
Process
- MOCVD
Substrate holder
Material
- Ceramic
Process
- ICP
Case
Material
- Ceramic
Process
- ICP
Plate
Material
- Ceramic
Process
- ICP
Tray
Material
- SiC
Process
- ICP
Flow channel
Material
- Ceramic, Quartz
Process
- MOCVD
Substrate(SIC coating on surface)
Material
- Graphite
Process
- MOCVD
Flow channel base
Material
- Quartz
Process
- MOCVD
Tray
Material
- Quartz
Process
- MOCVD
Chamber Wall Liner
Material
- Metal
Process
- Etch
Product Info
Contact
曾俊翔 Paulson Tseng
TEL : (03) 564-1224 ext.1606
Email : Paulson.tseng@tteam.com.tw
