Products
Substrate holder
Material
- Ceramic
Process
- ICP
Case
Material
- Ceramic
Process
- ICP
Plate
Material
- Ceramic
Process
- ICP
Tray
Material
- SiC
Process
- ICP
Long Boat
Material
- Quartz
Process
Flow channel
Material
- Ceramic, Quartz
Process
- MOCVD
Substrate(SIC coating on surface)
Material
- Graphite
Process
- MOCVD
Flow channel base
Material
- Quartz
Process
- MOCVD
Tray
Material
- Quartz
Process
- MOCVD
Copper Backing Plate
Material
Process
PBI
Material
- Ceramic
Process
shield frame
Material
- Ceramic
Process
PTFE
Material
- Plastic
Process
Peek
Material
- Plastic
Process
Vespel
Material
- Plastic
Process
