Etch Spare Parts
Coupling Ring
Material
- Quartz
Process
Gas injector
Material
- Quartz
Process
Baffle Plate
Material
- Si
Process
Bell Jar
Material
- Quartz
Process
Top Ring
Material
- Quartz, Si
Process
Insert Ring
Material
- Quartz, Si
Process
Electrode
Material
- Quartz, Si
Process
Ring Clamp
Material
- Metal, Quartz
Process
Pedestal AL Flat 86
Material
- Metal, Quartz
Process
DEPO Shield Ring
Material
- Metal, Quartz
Process
Chamber Wall Liner
Material
- Metal
Process
- Etch
300 mm RTP WINDOW
Material
- Quartz
Process
- Diffusion
Quartz Injector 改款 (可自行調整間距)
Material
- Quartz
Process
Quartz Injector 改款
Material
- Quartz
Process
- Etch
Quartz Injector
Material
- Quartz
Process
- Etch
Product Info
Description
AMT/TEL/LAM/Mattson equipments and parts
Usage
Oxid process、Poly process、Metal process、Stripper process
Specs
Quartz ring、Quartz Plate Si ring、Si Upper Electrode、Si Cell body
Contact
曾俊翔 Paulson Tseng
TEL : (03) 564-1224 ext.1606
Email : Paulson.tseng@tteam.com.tw
