Etch Spare Parts
G3 Mask Quartz Plate (VLR 700)
Material
- Quartz
Process
G3 Mask Quartz Plate
Material
- Quartz
Process
Quartz In-line Heater
Material
Process
Quartz Bath
Material
Process
Quartz Wafer Chuck
Material
- Quartz
Process
Quartz Wafer Guide
Material
- Quartz
Process
Ground Ring
Material
- Quartz
Process
Six Ring
Material
- Quartz
Process
Coupling Ring
Material
- Quartz
Process
Gas injector
Material
- Quartz
Process
Baffle Plate
Material
- Si
Process
Bell Jar
Material
- Quartz
Process
Top Ring
Material
- Quartz, Si
Process
Insert Ring
Material
- Quartz, Si
Process
Electrode
Material
- Quartz, Si
Process
Product Info
Description
AMT/TEL/LAM/Mattson equipments and parts
Usage
Oxid process、Poly process、Metal process、Stripper process
Specs
Quartz ring、Quartz Plate Si ring、Si Upper Electrode、Si Cell body
